From MEMS to NEMS: Modelling and characterization of the non linear dynamics of resonators, a way to enhance the dynamic range
Kacem N., Hentz S., Fontaine H., Nguyen V., Delaye M.T., Blanc H., Robert P., Legrand B., Buchaillot L., Driot N., Dufour R., CEA, FR
In order to compensate the loss of performances when scaling sensors down to NEMS, a process, characterization methods and above all an original analytical model including main sources of nonlinearities are presented. The permanent quest [...]