Lahdenperä J. – TechConnect Briefs

Compact Large-Displacement Model for Capacitive Accelerometer

Veijola T., Kuisma H., Lahdenperä J., Helsinki University of Technology, FI

A compact large-displacement model for a gas damped capacitive accelerometer is presented. The gas-film model has been derived from the modified nonlinear Reynolds equation, where the in uence of the gas rarefaction is included. The [...]

Dynamic Modelling and Simulation of Microelectromechanical Devices with a Circuit Simulation Program

Veijola T., Kuisma H., Lahdenperä J., Helsinki University of Technology, FI

Simulation blocks of micromechanical sensors and actuators modelling their dynamic electromechanical and fluidic operation are presented. Due to the electrical equivalent circuit realization the sensor system simulations in the frequency and time domains are possible. [...]