Jammes B. – TechConnect Briefs

Analytical Simulation of a 1D Single Crystal Silicon Electrostatic Micromirror

Camon H., Larnaudie F., Rivoirard F., Jammes B., LAAS/CNRS, FR

This paper is devoted to the study of the static and dynamic behavior of a 1D torsion single crystal silicon micro mirror. Our aim is to develop a parametric model allowing the use of single [...]

From Layout to System Simulation: An Example of an Oxygen Sensor

Camon H., Djafari-Rouhani M., Gué A.M., Dilhan M., Alonso C., Jammes B., LAAS/CNRS, FR

The development of microsystems has shown that the technologies and tools are mature enough to investigate the possibilities of complete CAD tools, as is the case in integrated circuit design. An oxygen sensor has been [...]