Blum Spahn O. – TechConnect Briefs

Static and Dynamic Optical Metrology of Micro-Mirror Thermal Deformation

Forest C.R., Reynolds-Brown P., Blum Spahn O., Harris J., Novak E., Wong C.C., Mani S., Peter F., Adams D., Sandia National Laboratories, US

A two-position micro-optical switch is being developed at Sandia National Laboratories. This MEMS device is shown in Figure 1 as a gear with a through-hole; the actuation mechanism is not shown. In the "on" position, [...]

Polysilicon Prototypes for Flip-bonded Hybrid MEM-tunable Filters and VCSELs

Ochoa E.M., Starman_Jr. L.A., Cowan W.D., Nelson_Jr. T.R., Blum Spahn O., Lott J.A., Air Force Institute of Technology, US

We characterize our novel mechanical structures for flip-bonded hybrid micro-electro-mechanically (MEM) tunable filters (MEM-TF) and MEM-tunable vertical cavity surface emitting lasers (MEM-TVCSELs) by comparing simulations with foundry fabricated actuators. Two of our prototypes, each with [...]