Adamschik M. – TechConnect Briefs

Modeling of High-speed Diamond Microswitch

Schmid P., Adamschik M., Ertl S., Kohn E., University of Ulm, DE

CVD grown diamond is a new attractive MEMS material and has been used here to realize a microswitch with extreme properties. Still at present the technological development requires a fast turnaround of the design based [...]

Modeling Approach for CVD-Diamond Based Mechanical Structures

Schmid P., Adamschik M., Ertl S., Gluche P., Kohn E., University of Ulm, DE

In this study, mechanical structures based on polycrystalline diamond films grown on silicon substrate are investigated. In contrast to all-silicon MEMS, additional problems arise due to the unusual properties of diamond. These effects are investigated [...]