The University of Birmingham – TechConnect Briefs

Electromechanical Model for a Single Port Nano-Mechancial Beam Resonator

Kemp T., Docker P.T., Ward M.C.L., Jones I.P., The University of Birmingham, UK

A simple electromechanical model for a nano-mechanical, magneto-motively driven beam resonator is derived. The model is developed in order to determine the dynamic electrical properties of the resonator. This enables the pickoff and drive electronics [...]

A Novel Method of Fabricating Optical Gratings Using the One Step DRIE Process on SOI Wafers

Cooper A.W., Docker P.T., Ward M.C., The University of Birmingham, UK

This paper describes a novel technique for manufacturing optical gratings by using the one step DRIE (Deep Reactive Ion Etching) process. Using the notching effect documented in previous work when working with silicon on insulator [...]

A Novel Method for Determining Optimum Etch Times for the One Step Dry Release Proces

Docker P.T., Kinnell P.K., Ward M.C., The University of Birmingham, UK

This paper details a novel method for determining the optimum etch times for releasing structures when using the authors one step dry release process. By using self releasing structures known as waffles the exact point [...]