Swiss Federal Institute of Technology of Lausanne

Electromechanical Modeling of MEMS Resonators with MOSFET Detection

Abelé N., Pott V., Boucart K., Casset F., Séguéni K., Ancey P., Ionescu A.M., Swiss Federal Institute of Technology of Lausanne, CH

This work reports on analytical modeling and investigation of Resonant Suspended-Gate MOSFETs (RSG-MOSFET) as future solutions for RF applications including MEMS and ICs. Pure metal-metal capacitive detection for resonators is shown to be the most [...]

Simulation of the Piezo-Tunnel Effect

Friedrich A.P., Besse P.A., Bächtold M., Popovic R.S., Swiss Federal Institute of Technology of Lausanne, CH

We present a new model of the piezo-tunnel effect in a heavily doped silicon p-n junction. Our approach is based on the coupling of a strain-dependent description of the energy exterma in the valence and [...]