SUPELEC – TechConnect Briefs

Reduced-order modelling of the Reynolds equation for flexible structures

Missoffe A., Juillard J., Aubry D., SUPELEC, FR

A reduced-order modelling technique for the Reynolds equation - which governs squeeze-film damping in MEMS structures - is presented in this paper. It is valid for flexible structures and large displacements, the only hypothesis made [...]

IDEA, a CAD Tool for the Design of Deformable Micro-Structures: Extension to the 2D Deformation of Arbitrarily-Shaped Membranes

Juillard J., Colinet E., SUPELEC, FR

A method for solving design problems involving coupled-field physics is presented: it is demonstrated in the case of the electrostatic actuation of a deformable micro-mirror. The focus of the present paper is on the inversion [...]

Application of MCLC Method for Estimating the Parameters of MEMS Sensors

Colinet E., Juillard J., Nicu L., SUPELEC, FR

An original method for estimating the parameters of MEMS sensors is presented. It is based on the measurement of binary oscillations appearing at the system's output when a discrete-time relay feedback is used: the parameters [...]