Sharp Labs of America, Inc. – TechConnect Briefs

IrO2 Nano Structures by Metal Organic Chemical Vapor Deposition

Zhang F., Barrowcliff R., Stecker G., Wang D., Hsu S-T, Sharp Labs of America, Inc., US

This paper will discuss the deposition of IrO2 nano structures using (methycycpentadienyl) (1, 5-cyclooctadiene) iridium as the precursor and using Metal Organic Chemical Vapor Deposition (MOCVD) method with no template. Three different shapes of IrO2 [...]