Münich University of Technology

Squeeze-Film Damping in Perforated Microstructures: Modeling, Simulation and Pressure-Dependent Experimental Validation

Niessner M., Schrag G., Iannacci J., Wachutka G., Münich University of Technology, DE

The reliable estimation of squeeze-film damping (SQFD) is a prerequisite for the design of many microelectromechanical systems (MEMS). The proper operation of several MEMS devices (e.g. accelerometers) often depends crucially on the damping forces, i.e. [...]

Calibration and Validation Procedure for Reliable and Predictive High-level Transducer Models Suited for System-level Design

Khalilyulin R., Schrag G., Wachutka G., Münich University of Technology, DE

We present an elaborated parameter extraction and model validation procedure for high-level transducer models that are aimed for system-level design as well as for hardware-software co-simulation (Matlab/Simulink transducer model embedded in control circuitry) in order [...]

Automatically Generated and Experimentally Validated System-Level Model of a Microelectromechanical RF Switch

Niessner M., Schrag G., Wachutka G., Iannacci J., Margesin B., Münich University of Technology, DE

In this work, we present a mixed-level model of an electrostatically actuated and viscously damped ohmic radio frequency (RF) microelectromechanical switch, which provides an accurate physical description of the device behavior and is suitable for [...]

Physically-Based High-Level System Model of a MEMS-Gyroscope for the Efficient Design of Control Algorithms

Khalilyulin R., Schrag G., Wachutka G., Münich University of Technology, DE

We present a high-level model of a dual gimbaled mass gyroscope, which provides an accurate physical description of the impact of external and internal disturbances on the output signal, but which also allows for the [...]

Adaptive Control for Reducing the Effect of Damping on the Output Signal of Microgyroscopes

Khalilyulin R., Hauck T., Wachutka G., Münich University of Technology, DE

A mixed-level modeling methodology is employed to set up a full system simulation model for microgyroscopes together with the control circuitry in order to investigate the performance of novel adaptive closed-loop control strategies, which allow [...]

Affiliations: Münich University of Technology

Squeeze-Film Damping in Perforated Microstructures: Modeling, Simulation and Pressure-Dependent Experimental Validation

Calibration and Validation Procedure for Reliable and Predictive High-level Transducer Models Suited for System-level Design

Automatically Generated and Experimentally Validated System-Level Model of a Microelectromechanical RF Switch

Physically-Based High-Level System Model of a MEMS-Gyroscope for the Efficient Design of Control Algorithms

Adaptive Control for Reducing the Effect of Damping on the Output Signal of Microgyroscopes

New Micro Hydro Power Device

Compact Thermal Model for Transient Temperature Fields in Electronic Systems

Evaluation of the Breakdown Behavior of 4H-SiC Schottky Diodes with a p-Guardring Junction Termination

Physically-Based Damping Model for Highly Perforated and Largely Deflected Torsional Actuators

Squeeze Film Damping in Arbitrary Shaped Microdevices Modelled by an Accurate Mixed Level Scheme