IMEC – Page 3 – TechConnect Briefs

Enhanced Mass Sensing for Nanomechanical Resonators

De Greve K., De Vlaminck I., De Greve K., De Vlaminck I., Naulaerts R., Sivasubramaniam V., Lagae L., Tilmans H.A.C., Borghs G., IMEC, BE

A new method for improving the mass detection limit of nanomechanical resonators in crystalline silicon, compatible with scaling, is demonstrated. Clamped-clamped silicon beam resonators are fabricated with a non-rectangular, ‘diabolo’ cross-section starting from SOI wafers. [...]

Analysis of the Nonlinear Behavior of a MEMS Variable Capacitor

Innocent M., Wambacq P., Donnay S., Tilmans H., Engels M., DeMan H., Sansen W., IMEC, BE

Today’s wireless communication systems often require a high linearity for the RF building blocks. One of these blocks can be a tunable LC filter using MEMS variable capacitors (varicaps). In these filters, the varicaps are [...]

A Multi-disciplinary Design Flow for Designing Embedded System on Silicon

Bolsens I., IMEC, BE

Integrating systems on silicon implies more and more concurrent design by multidisciplinary teams that combine expertise in different technology disciplines. Future systems on silicon win consist of multi-processor architectures with high bandwidth embedded memory architectures [...]