Opto-Electro-Mechanical model for MOEMS
Jacquemod G., Vuorinen K., Gaffiot F., Spisser A., Seassal C., Leclercq J-L, Rojo-Romeo P, Viktorovitch P., Laine J-P, Ledantec R., Benyattou T., Ecole Centrale de Lyon, FR
A highly selective and widely tunable optical filter based on MOEMS technology at 1.55 gm using a Fabry-Perot resonator with micromachined InP-air gap distributed Bragg reflectors has been designed and fabricated in our laboratory. The [...]