Coyote Systems, Inc. – TechConnect Briefs

Analysis of Realistic Large MEMS Devices

Ljung P., Bächtold M., Spasojevic M., Coyote Systems, Inc., US

A high-speed high-accuracy 3D field solver for the solution of coupled multi-physics encountered in MEMS is presented. The software AutoMEMS enables automatic model generation from layout, automatic meshing, adaptive mesh refinement of large complex geometries [...]

Creation of 3D Surface Models from 2D Layouts for BEM Anaylysis

Spasojevic M., Ljung P., Bächtold M., Coyote Systems, Inc., US

In this paper we present a new approach to creation of 3D surface models of MEMS devices from 2D layout masks suitable for analysis using the Boundary Element Method (BEM) [1]. The algorithm is implemented [...]