Carnegie Mellon University – Page 2

Layout Verification by Extraction for Micro Total Analysis Systems

Baidya B., Mukherjee T., Carnegie Mellon University, US

The increasing complexity of MicroTotalAnalysis Systems is leading to a growing need for verification tools for such designs. Numerical simulation of such designs are slow, memory consuming and practically impossible for large designs. Schematic-based simulation [...]

Topology Trade-offs in the Synthesis of Chip-based Electrophoretic Separation Systems

Pfeiffer A.J., Mukherjee T., Hauan S., Carnegie Mellon University, US

Micro-scale electrophoretic separation systems provide a highly effective, versatile and inexpensive method for separating a wide variety of chemical components. Particularly useful applications include separation of biological molecules, chemical sensing, and mobile drub delivery systems. [...]

A Simple Description of Turn-induced Transverse Field Dispersion in Micrlfluidic Channels for System-Level Design

Magargle R.M., Hoburg J.F., Mukherjee T., Carnegie Mellon University, US

This abstract shows a simple analytical model for turn-induced dispersion that captures an essential aspect of the transition field from uniform to circumferential that has been ignored in prior simple descriptions. The model applies directly [...]

Actuation for Probe-Based Mass Data Storage

Alfaro J.F., Fedder G.K., Carnegie Mellon University, US

This paper describes the development of a micro media actuator (MMA) for probe-based mass data storage. The process is based on dry etching and incorporates a thinned silicon media sled to increase the frequency response [...]

Simulation of Manufacturing Variations in a Z-axis CMOS-MEMS Gyroscope

Iyer S., Mukherjee T., Carnegie Mellon University, US

This paper uses MEMS circuit-level simulation to correlate gyro performance measures such as zero rate output (ZRO), linear acceleration sensitivity (Sa) and cross-axis sensitivity (Sca) to geometrical asymmetries. Elastic and electrostatic asymmetries in the gyroscope [...]

Dispersion Modeling in Microfluidic Channels for System-level Optimization

Baidya B., Mukherjee T., Hoburg J.F., Carnegie Mellon University, US

Chip-based microfluidic separation systems often use serpentine channels to achieve long separation lengths in minimal area. Such designs suffer from the ‘racetrack’ effect due to the bends in the microchannel. In addition, the skew produced [...]

Large-Deflection Beam Model for Schematic-Based Behavioral Simulation in NODAS

Jing Q., Mukherjee T., Fedder G.K., Carnegie Mellon University, US

MEMS design in NODAS is based on a geometrically intuitive schematic representation of MEMS using a small set of atomic elements (anchors, beams, plates and electrostatic gaps), each of which is associated with a geometrically [...]

Modeling of Joule Heating in Electrophoretic Separation Microchips

Wang Y., Lin Q., Hoburg J.F., Mukherjee T., Carnegie Mellon University, US

This paper presents a model for Joule heating induced analyte dispersion in electrophoretic separation channels with a rectangular cross section. The model is in closed form and captures the effect of cross-sectional geometry. Three-dimensional numerical [...]

Challenges in CMOS-MEMS Extraction

Baidya B., Mukherjee T., Carnegie Mellon University, US

CMOS micromachining processes are being increasingly used to fabricate integrated MEMS devices. Verification of such designs requires extraction from layout to mixed domain circuits and MEMS schematics for lumped parameter simulation. The higher etch hole [...]

Macromodeling Temperature-Dependent Curl in CMOS Micromachined Beams

Iyer S., Lakdawala H., Fedder G.K., Mukherjee T., Carnegie Mellon University, US

Temperature sensitive curling is commonly observed in MEMS structures fabricated using a standard CMOS pro-cess. In this paper, a macromodel for vertical and lateral curling effects is derived by extending thermal multimorph theory for cantilever [...]