California Institute of Technology – Page 2

A Framework for Mask-Layout Synthesis Implementing a Level Set Method Simulator

Lee C.-Y., Antonsson E.K., California Institute of Technology, US

Recently, evolutionary methods have been developed to automate MEMS mask-layout synthesis [3]{[6]. These design synthesis methods are iterative searches in which each iteration consists of mask-layout modification, determination of etched shape via an arbitrary 3-D [...]

Modeling and Analysis of Hysteresis Phenomena in Electrostatic Zipper Actuators

Guidotti P., Bernstein D., California Institute of Technology, US

We investigate the relationship between the pull-in phenomenon for electrostatic actuators and the hysteresis effect found in zipper actuators. Liked lumped mass and spring and tension based membrane models, we show that a beam model [...]

Robust Mask-Layout Synthesis for MEMS

Ma L., Antonsson E.K., California Institute of Technology, US

A method for automated mask-layout and process synthesis for MEMS using Genetic Algorithms was proposed by Ma and Antonsson [5]. For a given desired device shape, and several fabrication process choices, this synthesis method will [...]

Mathematical Analysis of Electrostatically Actuated MEMS Devices

Bernstein D., Guidotti P., Pelesko J.A., California Institute of Technology, US

We perform a rigorous mathematical analysis of a simple membrane based model of an electrostatiacallyh actuated MEMS device. Using both analytical and numerical techniques, we prove the existence of a fold in the solution space [...]

Electron Vortices in Semiconductor Devices

Mohseni K., Shakouri A., Ram R.J., California Institute of Technology, US

The hydrodynamic model of electron transport in semiconductors is analyzed and in analogy to uid mechanics the transport equation for the electron vorticity, rv, is derived. Aside from the classical hydrodynamic sources of vorticity, collision [...]

Heterogeneous Thin Films of Martensitic Materials with Application to Large Strain Microactuators

Shu Y.C., California Institute of Technology, US

We propose a multiscale modeling to study the effective behavior of a heterogeneous thin film accounting in detail for the underlying microstructure, grain sizes and the film thickness. Motivated by the recent study of shape-memory [...]

Heterogeneous Thin Films of Martensitic Materials with Application to Large Strain Microactuators

Shu Y.C., California Institute of Technology, US

We propose a multiscale modeling to study the effective behavior of a heterogeneous thin film accounting in detail for the underlying microstructure, grain sizes and the film thickness. Motivated by the recent study of shape-memory [...]

Self-Adapting Vertices for Mask-Layout Synthesis

Lee C.-Y., Antonsson E.K., California Institute of Technology, US

An efficient procedure for synthesizing MEMS mask-layouts for a desired 3-D shape is discussed. This method can greatly reduce the number of design and prototype iterations required to produce a desired device. The method is [...]

Automated Mask-Layout and Process Synthesis for MEMS

Ma L., Antonsson E.K., California Institute of Technology, US

This paper presents a method for automated mask-layout and process synthesis for MEMS. The synthesis problem is approached by use of a genetic algorithm. For a given desired device shape, and several fabrication process choices, [...]

Design of Compensation Structures for Anisotropic Etching

Long M.K, Burdick J.W., Antonsson E.K., California Institute of Technology, US

Due to the highly anisotropic behavior of ilicon bulk etching,there have been many publications on etch simulation and convex corner compensation for specific geometries. Our previous work introduced a general framework for algorithmically synthesizing mask [...]