US – Page 440 – TechConnect Briefs

An Efficient Optical Propagation Technique for Optical MEM Simulation

Kurzweg T.P., Levitan S.P., Martinez J.A., Kahrs M., Chiarulli D.M., University of Pittsburgh, US

As designers become more aggressive in introducing optical components into micro-systems, additional capabilities are required for modeling and simulation tools. Common optical modeling techniques are not applicable for most optical micro-systems, and techniques that are [...]

Development of a MEMS Vertical Planar Coil Inductor

Chen J., Zou J., Liu C., Kang S-M, Agere Systems, US

This paper presents the results of the development of a vertical planar coil inductor. The planar coil inductor is first fabricated on silicon substrate and then assembled to the vertical position by using a novel [...]

Magnetic Properties over Several Length Scales: Micro-magnetic Modeling and Effective Medium Theory

Harter A.W., Mohler G., Moore R., Schultz J., Georgia Tech Research Institute, US

We combine micro-magnetic modeling with effective medium theory to predict the bulk properties of magnetic composites, in particular those of ferrite particles in a non-magnetic matrix. We verify our model using published measured data of [...]

Modeling a Growth Instability in Stressed and Ion-Implanted Doped Silicon

Phan A-V, Kaplan T., Gray L.J., Barvosa-Carter W., Aziz M.J., Oak Ridge National Laboratory, US

The effects of rate-enhancing dopants and externally applied stress on interfacial growth during silicon crystallization are modeled using advanced numerical methods. The boron doped crystalline Si is modeled as an isotropic linear elastic solid, and [...]

Capillary Interaction Between a Small Thin Solid Plate and a Liquid

Taher M., Saif T., University of Illinois Urbana-Champaign, US

Micromechanical systems are increasingly being used in micro fluidic and biological applications where solid-liquid interaction phenomena become important. Here, we present an analytical/computational study on the interaction force between a thin solid plate interfacing with [...]

Modeling Sub-Continuum Effects on the Mechanical Properties of Ultrathin Macromolecular Layers

King W.P., Goodson K.E., Stanford University, US

This paper makes progress on the prediction of mechanical modulus and mechanical relaxation time of macromolecular materials at small length and time scales. Fundamental studies of large molecules in confined geometries inform predictions of macroscopic [...]

Residual Stress Characterization in MEMS Microbridges using Micro-Raman Spectroscopy

Starman_Jr. L.A., Ochoa E.M., Lott J.A., Amer M.S., Cowan W.D., Busbee J.D., Air Force Institute of Technology, US

We characterize and measure the pre-released residual stress levels in polysilicon Micro-Electro-Mechanical Systems (MEMS) microbridges using micro-Raman spectroscopy. Raman spectroscopy is nondestructive, fast, and provides the potential for in situ stress monitoring during fabrication. Residual [...]

RF Measurement Techniques for Micro-Cantilever Characterization and Application

Wang C-H, Weber R.J., Iowa State University, US

The reflection coefficient (S11) of a one-port device is most sensitive to its input impedance if a matched condition is obtained. This implies two methods to measure the deflection-induced impedance change for a 1-port device [...]

Simulation and Modeling of a Micro Pressure Sensor Array

Jin J., Zhou Z., Georgia Institute of Technology, US

In order to integrate MEM devices with CMOS circuits, compatibility of materials, micron scale mechanical structures, and the fabrication technology with CMOS is imperative. This paper describes the design of a micron scale pressure sensor [...]

Modeling of a Self-Retracting Fully-Compliant Bistable Micromechanism

Masters N., Howell L.L., Georgia Institute of Technology, US

The purpose of this paper is to demonstrate how a combination of models facilitated the development of a new class of small displacement fully-compliant bistable micromechanisms (Self-Retracting Fully-compliant Bistable Micromechanism, or SRFBM). Two different Pseudo-Rigid-Body [...]