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Design Optimization of a Surface Micromachined Electro-Thermal Beam Flexure Polysilicon Actuator

Atre A., Georgia Institute of Technology, US

Electro-thermal polysilicon actuators are widely employed in optical MEMS applications. These actuators are typically designed for maximum deflection (unloaded) or force (loaded) output characteristics. The optimal design methodology of the actuator has been investigated previously [...]

Control of Particles Using Multi-Frequency DEP

Loire S., Zhang Y., Bottausci F., Mezic I., McDonald N., university of california, santa barbara, US

We present numerical simulations and experiments on dielectrophoretic (DEP) separation and trapping performed in a titanium-based microchannel linear electrode array. The device is designed to allow for effects driven by inhomogeneities in electric-field magnitude driven [...]

MEMS Reliability Assessment ProgramMicro-electromechanical Systems (MEMS) Reliability Assessment Program for Department of Defense Activities

Zunino III J.L., Skelton D., Mason R., U.S. Army Corrosion Office, US

As the U.S. Army transforms into a lighter, more lethal force, the technologies that support both legacy and emerging weapon systems must decrease in size while increasing in intelligence. Micro-electromechanical systems (MEMS) are one such [...]

Nanoparticle Separations Using Miniaturized Field-Flow Fractionation Systems

Graff M., Edwards T.L., Gale B.K., Frazier A.B., Georgia Institute of Technology, US

Paper describes the fabrication and testing of a micromachined electrical field-flow fractionation system, performing separations of various types of nanoparticles.

Application of Mass Transport in Solid Electrolyte Films in Tunable Microelectromechanical Resonators

Kozicki M.N., Brown III C.L., Mitkova M., Enderling S., Hedley J., Walton A.J., Arizona State University, US

We report on the initial results of a study involving a novel materials scheme – a solid electrolyte-electrodeposit system based on germanium selenide glass doped with silver – which holds great promise as a means [...]

Automated and Integrated Mask Genertion from a CAD Constructed 3D Model

Schiek R.L., Schmidt R.C., Sandia National Laboratories, US

We have developed and implemented a method which when given a three-dimensional object can infer from the object's topology the two-dimensional masks needed to produce that object with surface micromachining. The masks produced by this [...]

Biologically Functionalized Nanochannels on Ferroelectric Lead Zirconium Titanate Surfaces

Ocola L.E., Pan W.C., Kuo M., Tirumala V.R., Reiss B.D., Firestone M.A., Auciello O., Argonne National Laboratory, US

We recently started a program at Argonne to exploit patterned, polarizable ferroelectric surfaces, such as lead zirconium titanate (PZT), as a means to create field-responsive inorganic-biomolecule interfaces to study and manipulate biomatter on surfaces. In [...]

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