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Smart, Intelligent and Cogent Microsensors – Intelligence for Sensors and Sensors for Intelligence

Gaura E., Newman R.M., Coventry University, UK
The paper develops a terminology to describe sensors which have been enhanced in some way by the integration of some additional processing circuitry. Several terms, current in the literature, including 'smart sensors' and 'intelligent sensors' [...]

Electrostatic Tuning of a Micro-Ring Gyroscope

Gallacher B.J., Hedley J., Burdess J.S., Harris A.J., Rickard A., King D., Insat University of Newcastle, UK
This paper describes a procedure for identifying and correcting anisoinertia and anisoelasticity present in a micro-ring gyroscope. The major disadvantages of popular tuning methods such as mass trimming using laser ablation or focussed ion beam [...]

Simulation of Micromachined Inertial Sensors with Higher-Order Single Loop Sigma-Delta Modulators

Dong Y., Kraft M., University of Southampton, UK
Micromachined capacitive inertial sensors incorporated in sigma-delta force-feedback loops have been proven to improve linearity, dynamic range and bandwidth, and also provide a direct digital output. Previous work mainly focused on using only the sensing [...]

System Issues in Arrays of Autonomous Intelligent Sensors

Newman R.M., Gaura E.I., Conventry University, UK
This paper considers some of the systems level issues of concerned when building of large scale sensing systems composed of a large number of autonomous intelligent sensors. The work is motivated by the potential offered [...]

Device Characterization at the Wafer Level via Optical Actuation and Detection

Hedley J., Burdess J.S., Harris A.J., Gallacher B.J., Newcastle University, UK
This paper investigates the technique of optical actuation of MEMS. It is shown that a device can be driven into all of its vibrational modes simply and non-destructively by a laser pulse, making this an [...]

The Application of Parametric Excitation to a Micro-Ring Gyroscope

Gallacher B.J., Burdess J.S., Harris A.J., Hedley J., Insat University of Newcastle, UK
This paper reports on a parametric excitation scheme that separates the drive and response frequencies of a micro-ring gyroscope in the ratio 10:1 approximately, with the aim of minimising electrical "feedthrough". Electrical feedthrough of the [...]

Modelling and Fabrication of Microspring Thermal Actuator

Luo J.K., Flewitt A.J., Spearing M., Fleck N.A., Milne W.I., University of Cambridge, UK
A new spring type microelectrothermal actuator with greatly enhanced displacement is proposed. Instead of using a single long chevron actuator, several chevrons are folded into a number of sections to become a spring-like actuator. Insulating [...]

Design & Simulation of a Mechanical Amplifier for Inertial Sensing Applications

Kham M.N., Houlihan R., Kraft M., Southampton University, UK
This paper describes the design and simulation of a mechanical amplifier used to improve the performance of a capacitive accelerometer. It comprises a long silicon beam attached to the proof mass and it amplifies the [...]

A Generic Sensor for Ultra Low Analyte Concentration Detection

Hedley J., McNeil C.J., Burdess J.S., Harris A.J., Dobson M.G., Suarez G., Berney H., Newcastle University, UK
This paper reports on the development of a MEMS based generic mass sensor system (international patents pending) aimed at quantitative analyte measurement with a sensitivity of the order of 0.01 ng per cm sq. The [...]

A Molecular Motor that Links the Biological and Silicon Worlds

Robinson T., Blundell A., Dutta C.F., Firman K., University of Portsmouth, UK
The EcoR124I restriction endonuclease is also a biological molecular motor. It is able to attach to DNA at a specific location and then translocate the rest of the DNA molecule through the bound complex. Therefore, [...]

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