NL – Page 7 – TechConnect Briefs

Advanced Particle Beam Technologies for Nano-Characterization and Fabrication

Mulders J.J.L., Greiser J., FEI Company, NL

As the structures under investigation grow ever smaller, the need for high resolution, nanoscale imaging and protoyping is a constant factor. The presented range of DualBeam and single column focused ion and electron beam microscopes [...]

Modular Design Approaches for MicroFluidic Systems

Gilde M.J., van den Vlekkert H., Leeuwis H., Prak A., CapiliX BV, NL

The possibilities promised by microfluidic systems have not only interested scientists, but also industries, especially in the areas of the Life Sciences (food, medical, biotech) and fine chemistry (pharma) [2]. Microfluidics is the MEMS-field in [...]

Polymeric Hybrid Microstructures for Smart Targeting and Drug Delivery

Dudia A., Kanger J.S., Subramaniam V., University of TWente, NL

Artificial cells (AC) refer to (sub) micro-vehicles that can perform a specific bio-function in the body, without being rejected from the immune system. Such smart targeting and drug delivery systems are aimed for use in [...]

Analytical Model for the Pull-in Time of Low-Q MEMS Devices

Rocha L.A., Cretu E., Wollfenbuttel R.F., Delft University of Technology, NL

A meta-stable transient region just beyond pull-in displacement that ultimately governs the pull-in time in critically damped systems is identified in this paper. Since the pull-in displacement time is basically governed by this second region [...]

Free Surface Flow and Acousto-Elastic Interaction in Piezo Inkjet

Wijshoff H., Océ Technologies B.V., NL

Modeling plays an essential role in our research on new inkjet technologies. Structural modeling with Ansys includes piezo-electricity. Acoustic modeling in Ansys and Matlab involves fluid-structure interaction. CFD modeling with Flow3D includes wall-flexibility and free [...]

A Full-System Dynamic Model for Complex MEMS Structures

Rocha L.A., Cretu E., Wollfenbuttel R.F., Delft University of Technology, NL

For full characterization of a surface micromachined MEMS device, where the thickness of the moving layer is just a few times the gap size, the modeling has to take large-signal behavior and end effects into [...]

Recent Enhancements of MOS Model 11

van Langevelde R., Scholten A.J., Klaassen D.B.M., Philips Research Laboratories, NL

MOS Model 11 (MM11) is a surface-potential-based compact MOSFET model, which was introduced in 2001 (level 1100). An update of MM11, level 1101, was introduced in 2002. At the moment a second update of MM11, [...]

Soft and Probe Lithography without Ink Transfer

Huskens J., Li X., Péter M., Reinhoudt D.N., University of Twente, MESA+ Research Institute, NL

Microcontact printing (mCP) and dip-pen nanolithography (DPN) are versatile techniques for the creation of patterned surfaces. They commonly employ the transfer of an ink (e.g. a thiol) onto a surface (e.g. a gold-coated substrate) thus [...]

Integrated High Frequency RF Inductors with Nano/micro Patterned Ferromagnetic Cores

Zhuang Y., Vroubel M., Rejaei B., Burghartz J.N., Delft University of Technology, NL

Integration of magnetic material has been long proposed to potentially improve performance and shrink size of on-chip inductive RF/microwave components, e.g. inductors, transformers, and transmission lines, which is crucial for the development of cost-effective RF/BiCMOS [...]

FEM Assisted Design of Novel Electrothermal Actuators

Deladi S., Krijnen G., Elwenspoek M., University of TWente, NL

The demand for powerful actuators, which can be embedded into MEMS devices draws attention to electrothermal actuators, although there can be drawbacks such as the heat created during actuation. The main advantage is the low [...]