JP – Page 32 – TechConnect Briefs

Resonant-Type Micro-Probe for Vertical Profiler

Lebrasseaur E., Bourouina T., Pourcie J-B., Ozaki M., Masuzawa T., Fujita H., LIMMS/CNRS-IIS, JP

We present a characterization method, which is dedicated to the measurement of the inner dimensions of high aspect ratio micro-holes, typically 100mm in diameter and 1mm in depth. Micro-probes with an integrated force-sensitive element are [...]

Atomic Force Microscopic Visualization of Identical Site on Cell Surface with Different Probes

Ohta Y., Kobayashi T., Okamoto H., Okuda T., Toyo University, JP

For these several years Atomic Force Microscopy (AFM) has been widely used for visualization of biological samples with high resolution on nanometer scale. Whereas any biological information regarding specific reactions, such as immunological function, cannot [...]

Modeling and Optimization of Bi-stable Optical Switch

Maekoba H., Helin P., Reyne G., Bourouina T., Fujita H., Cybernet Systems Co. Ltd., JP

High performance silicon-based, micro-optical switch are being developed for application to optical networks. The mechanical part was fabricated in a one-level mask step by bulk micromachining of (100) monocrystalline silicon with KOH. The resulting structure [...]

Computing Isomeric Higher and Smaller Fullerenes: Materials Controlled by a Profound Enthalpy/Entropy Interplay

Zhao X., Slanina Z., Osawa E., Toyohashi University of Technology, JP

Early results from the eighties for small carbon clusters like C4 or C6 have suggested that the combined quantum-chemical and statistical-mechanical computations could show some interesting temperature effects also for isomeric fullerenes. This feature was [...]

Monte Carlo Simulation Study of Mechanical Properties of Au Nanowires

Tanimori S., Shimamura S., Yamaguchi University, JP

We have carried out Monte Carlo simulations of elongation and shear of Au nanowires to investigate their mechanical properties. We have followed stable atomic arrangements in the nanowires during deformation. The Morse potential has been [...]

A Simple VLSI Spherical Particle-Induced Yield Predictor

Nakamae K., Ohmori H., Fujioka H., Osaka University, JP

A simple VLSI particle-induced yield predictor has been developed that allows us to predict the entire yield of VLSI and also to analyze the bottleneck processing steps and faults. Particles with spherical shape are generated [...]

Implementation of Strain Induced Effects in Sensor Device Simulation

Matsuda K., Kanda Y., Naruto University of Education, JP

Device simulation technique is applied to the piezoresistive sensor by including the doping profile and the strain distribution in the silicon substrate. In this simulation, the device equations are solved by Newton's method taking into [...]

SPDC: An Automatic Generator of Input Data for Process Simulators from Process Flow Data for Manufacturing

Tatsumi T., Ansai H., Mukai M., Komatsu Y., Sony Corporation, JP

We have developed a system called SPDC, which is designed to automatically generate input data for simulation from process ow data for manufacturing. As this conversion is not one-to-one translation, SPDC prepares databased knowledge called [...]

Simulation of Silicon Piezoresistive Sensors

Matsuda K., Kanda Y., Toyo University, JP

The temperature infiuence of the heavy doped silicon piezoresistive sensors is simulated. In this simulation, the density of state functions for impurity band and band edge tail are taken into account for carrier and ionized [...]

Micromanipulation and Robotic Technology

Fukuda T., Arai F., Univerisity of Nagoya, JP

Micromanipulation is needed for assembly and maintenance of micro machines and their parts. Micromanipulation is also important for bio-science and bio-engineering field. Yet, the design and control methodology for micromanipulation is not well established. In [...]