Papers:
A Full-System Dynamic Model for Complex MEMS Structures
For full characterization of a surface micromachined MEMS device, where the thickness of the moving layer is just a few times the gap size, the modeling has to take large-signal behavior and end effects into [...]
Mixed-Domain Simulation of Step-Functional Voltammetry with an Insoluble Species for Optimization of Chemical Microsystems
Microinstruments with integrated sensors and electronics are well adapted for remote environmental monitoring applications. Optimization of these microinstruments, however, has been difficult due to a previous lack of mixed-domain simulation environments. This work presents a [...]
System-Level Optical Interface Modeling for Microsystems
In this paper, we present an accurate and computationally efficient system-level optical propagation technique suitable for the modeling of optical interfaces. Our technique is based on extensions to the angular spectrum technique used to solve [...]
Journal: TechConnect Briefs
Volume: 2, Technical Proceedings of the 2004 NSTI Nanotechnology Conference and Trade Show, Volume 2
Published: March 7, 2004
Industry sector: Sensors, MEMS, Electronics
Topic: Modeling & Simulation of Microsystems
ISBN: 0-9728422-8-4