Qasmi M., Delobelle P., Richard F.
Université de Franche-Comté, FR
Keywords: grain size, hardness, inverse method, nanoindentation, numerical modelling, Young modulus
The aim of this paper is a wide investigation of the nano scale of the elastoplastic properties of electroplated Nickel, which is extensively used in the LIGA techniques and polycrystalline hardened and annealed Nickel with large grains diameter. Using instrumented nanoindentation technique, we have obtained the Berkovich’s Hardness Hb and the Young’s modulus E. These mechanical properties are affected by the current densities used during the electroplating as well as the nature of the substrates and ion chloride density. Experiments were made on Ni samples having a colony diameter d between 0.2 up to 3 micrometers and polyscrystalline of 150 micrometers of diameter. Results obtained through nanoindentation let us show that it exists a Hall and Petch relationship between the hardness Hb and the colony diameter. Numerical modeling of the nanoindentation test using a Finite Element Method (FEM) was done in order to identify the elasto-plastic parameters ofan isotropic behavior law of the material using an inverse method.
Journal: TechConnect Briefs
Volume: 3, Technical Proceedings of the 2004 NSTI Nanotechnology Conference and Trade Show, Volume 3
Published: March 7, 2004
Pages: 417 - 420
Industry sector: Sensors, MEMS, Electronics
Topic: Modeling & Simulation of Microsystems
ISBN: 0-9728422-9-2