Papers:
Design Optimization of Microsystems
At systems level, however, the extreme complexity of FEM models (many network nodes, long computer times) requires the use of models determined analytically. As the complexity of the search space of such analytical models becomes [...]
Systematic Design of Electrothermomechanical Microactuators using Topology Optimization
Design methods for MicroElectroMechanical Svstems (MEMS) have, until now, typically been based on intuition, experience and triai and error approaches. A method which may be used to design mechanical and electromechanical coupling parts of MEMS [...]
SEGS: On-line WWW Etch Simulator
This paper presents an interactive on-line wet etch simulator (SEGS) which predicts the etched shape as a function of time for arbitrary isotropic or anisotropic etchants and any initial mask shape. Using any Javaenabled web [...]
Computer Aided Modeling of Static and Dynamic Transfer Characteristics
When creating mathematical models of microsystem components or microelectronic devices, analytical and experimental modeling concepts can be distinguished. Analytical modeling, often performed on process or device level, can only be applied if the equations and [...]
Simulating 3-Dimensional Deep X-ray Lithography Using the CXrL Toolset
Experimental evaluation of the dose distribution resulting from 3-dimensional deep x-ray lithography is often impractical. Computer modeling is a valuable tool for simulating this system. Preliminary simulations of 3-dimensional, deep, xray lithography exposures have been [...]
Autonomous Agents Design for Digital Network Maximization in Joint C4I System
The advent of the computer age has brought about an ever increasing demand to transfer exponentially increasing amounts of information, and the as ciated problems of information sharing. The focus of this pa is to [...]
An Environment for MEMS Design and Verification
A comprehensive CAD software environment is presented for MEMS/MST design. It includes MEMS mechanical schematic entry, parameterized cell layout generation, automatic lumped parameter macro-model generation, and LVS style error checking. These tools allow for flexible [...]
Multi-Mode Sensitive Layout Synthesis of Microresonators
Microresonator layouts are synthesized such that their preferred mode of oscillation is well-separated from the higher order in-plane and out-of-plane modes. Building on our previous work, we have incorporated models for four out-of-plane modes. All [...]
DOPDEES/PMM: A System for Portable Model Description
We have developed a multi-purpose partial differential equation solver, DOPDEES, which is capable of solving initial value problems in one spatial dimension using a finite differences method. The system of partial fferential equations is specified [...]
FELLINI-A CAD Tool for the Design of Microsystems
This paper reports of the CAD-tool FELLINI, which supports the design of microsysfems on the lower levels of abstraction. FELLINI provides a bidirectional interface between the structural and the layout level. A Layout-to-FEM converter as [...]
Journal: TechConnect Briefs
Volume: Technical Proceedings of the 1998 International Conference on Modeling and Simulation of Microsystems
Published: April 6, 1998
Industry sector: Sensors, MEMS, Electronics
Topic: Modeling & Simulation of Microsystems
ISBN: 0-96661-35-0-3