Moon J-S., Shkel A.
University of California Irvine, US
Keywords: etalon, Fabry-Perot interferometer, MEMS, MEMS Fabry-Perot interferometer, multiphysics modeling, surface micromachining
This paper focuses on the performance limits of a tunable-cavity Fabry-Perot filter (FPF)implemented using MEMS technology.This is a versatile device capable of many functions,including light modulation and high precision sensing.Our goal is to explore challenges and opportunities i implementing tunable-cavity filter using MEMS technology.Thermal stability and effects of fabrication imperfections are studied.Based o coupled-field modeling analysis,it is concluded that the device is extremely sensitive to thermal fluctuations and fabrication imperfections degrading performance significantly. It is emphasized that if these challenges are appropriately addressed,the device will be a low cost alternative to existing DWDM filters and variety of precision sensors.
Journal: TechConnect Briefs
Volume: 1, Technical Proceedings of the 2001 International Conference on Modeling and Simulation of Microsystems
Published: March 19, 2001
Pages: 278 - 281
Industry sector: Sensors, MEMS, Electronics
Topics: Chemical, Physical & Bio-Sensors, MEMS & NEMS Devices, Modeling & Applications
ISBN: 0-9708275-0-4