MEMS & NEMS Devices, Modeling & Applications – Page 17

Design and Fabrication of a Metallic MEMS Gripper Using Electro-Thermal V-Shape and Modified U-Shape Actuators

Khazaai J.J., Qu H., Shillor M., Smith L., Oakland University, US

This abstract reports on the design, fabrication, and characterization of a distinctive MEMS gripper electro-thermally driven by the new metallic (electroplated nickel) V-shape actuator (VSA) and the modified U-shape actuators (mUSA). The VSA and the [...]

SC Cavities Fast Tuning System Based on Piezoelectric Actuators

Przygoda K., Pozniak T., Napieralski A., Sekalski P., Grecki M., Technical University of Lodz, PL

The main part of linear accelerator (linac), used for driving the Free-Electron Laser (FEL) machine, is superconducting (SC) resonant cavity. The SC cavity is very susceptible to small changes in dimension because of a very [...]

Fabrication and analysis of MEMS test structures for residual stress measurement

Sharma A., Kaur M., Bansal D., Kumar D., Rangra K., Central Electronics Engineering Research Institute (CEERI/ CSIR), IN

A set of microstructures for in situ stress measurement is presented. It is based on lancet principle, with dedicated design for the amplification of the dimensional variations induced by the internal stress of the structural [...]

Multi-purpose tool for checking the microfabrication products

De Pasquale G., Somà A., Politecnico di Torino, IT

This paper introduces a multi-purpose tool addressed to the microfabrication processes monitoring and material property measurement at the wafer level during both process development and manufacturing. The on-line testing tool presented in this paper is [...]

Fabrication of Nano-structures of NiTi Shape Memory Films and Investigations on Size dependence of their Mechanical Properties

Sharma S.K., Mohan S., Indian Institute of Science, Bangalore, IN

Focused Ion Beam (FIB) micro-machining technique has been used to generate various nano-structures on NiTi shape memory alloy films. The fabrication and nano-mechanical investigations of the nano-structures have been included in this paper.

An Improved Micro Injection Molding Technique for Grating Devices

Li H.S., Liu K.C., Hsieh W.H., Au L.K.C., Liu K.C., National Chung Cheng University, TW

There is a new method about grating fabrication in our submission abstract. This method can help us to fabricate micro or nano devices more easily and inexpensively. I think it is very suitable for this [...]

Modularity in the Design and Volume Production of Microfluidic Devices

Podczerviensky J., Levine L., ALine, Inc., US

Robust fabrication of functional components in microfluidic devices will drive down their cost and improve their performance. We have developed a modular and readily customized approach for routine and volume production of complex microfluidic devices [...]

High-aspect-ratio deep Si etching of micro/nano scale features with SF6 /H2/ O2 plasma, in a low plasma density reactive ion etching system

Sanaee Z., Poudineh M., Mehran M., Mohajerzadeh S., University of Tehran, IR

In this paper we report a novel low plasma power reactive ion etching technique to achieve high rate, high aspect ratio features on silicon. The etching process is achieved using a sequential passivation and etching [...]

Comparaison between PDMS and PMMA for MEMS applications

Benachaiba C., Bouanini M., University of Bechar, DZ

The elastometer applications for MEMS are recent technology, in this article we modeling PDMS membrane and PMMA membrane subjected to pressure force for microvalve applications.

Fracture-induced polymeric grating structures

Lin C.C., Yang F., Chin J.W., Sung L., Lee S., National Tsing Hua Univesity, TW

Fracture-induced structure (FIS)1 is found in the polymeric thin film sandwiched between two relatively rigid flat plates by inserting a razor blade at one edge. FIS is a potential candidate to be a low-cost and [...]