Sensors, MEMS, Electronics – Page 367

Thermal Management of Micro-Hotplates using MEMCAD as Simulation Tool

Briand D., Grétillat M.-A., van der Schoot B., de Rooij N.F., Institute of Microtechnology, CH

In this paper we report on the electrothermal simulations performed in the aim of optimising the power consumption and the temperature distribution of micro-hotplates for gas sensing applications. The micro-hotplate designs were optimised using the [...]

Numerical Simulation of Pulse-Width-Modulated Micropumps with Diffuser/Nozzle Elements

Nguyen N-T., Huang X., Nanyang Technological University, SG

This paper presents the numerical simulation of a new control method for dynamic micropumps with diffuser/nozzle elements: the pulse-width-modulation (PWM) of the drive signal. A piezo disk with a square wave signal actuates the pump, [...]

Dynamic Analysis of an Electrostatic Micropump

Jiang T.Y., Ng T.Y., Lam K.Y., National University of Singapore, SG

In this paper, a micropump actuated by electrostatic force is dynamically analysed. Mathematical model is established to evaluate the dynamic response of the micropump. Electro-mechanical coupling effect is considered in evaluating the electrostatic force applied [...]

Applications: Micropumps, Heaters and Coolers

Design and Simulation of A Novel Highly Symmetrical Piezoelectric Triaxial Accelerometer

Li G., Li T., Li Z., Li G., Li T., Li Z., Wang C., Hao Y., Li G., Li T., Li Z., Wu G., Peking University, CN

A monolithic piezoelectric triaxial accelerometer, using a highly symmetric quad-beam structure with a single seismic mass, has been developed. The structure of the accelerometer is analyzed in detail theoretically and numerically. Static and modal simulations [...]

On Design of a Backplate Used in a Hearing Aid

Pedersen N.L., Technical University of Denmark, DK

In this work topology optimization is used to optimize the compliance or the eigenfrequencies of prestressed plates. The prestress is accounted for by including the force equivalent to the prestressing and adding the initial stress [...]

Optimal Design of A Tuning Fork Gyroscope and Its Testing Experiment

Dong Y., Tay F.E.H., Wen Y., Yuan X., Chen W.T., National University of Singapore, SG

The eigenfrequency of a MEMS Tuning Fork Gyroscope (TFG) is calculated using a formula derived from Rayleigh method. From this formula, the objective function for the optimal design is established. Then two methods to solve [...]

Design of Piezoresistive Silicon Cantilevers with Stress Concentration Regions (SCR) for Scanning Probe Microscopy (SPM) Applications

Gupta A., Bashir R., Neudeck G.W., McElfresh M., Purdue University, US

This paper describes and evaluates the incorporation of novel Stress Concentration Region (SCR) in silicon based cantilevers to enhance piezoresistive displacement, force, and torque sensitivities. In brief, SCR is a region, on the cantilever, with [...]

Analysis of Anodic Bonding and Packaging Effects in Micro Sensors

Shing T-K, Industrial Technology Research Institute, TW

Anodic bonding is quite popular in making micro-sensors since it can bond sodium-rich glass to silicon or virtually any metals with good adhesion strength in lower temperature. It is well known that this process will [...]

The Effect of Thermal Boundary Conditions and Scaling on Electro-Thermal-Compliant Micro Devices

Mankame N., Ananthasuresh G.K., University of Pennsylvania, US

Electro-thermal micro actuators that operate by virtue of constrained thermal expansion induced by Joule heating, have recently received considerable attention. We use electro-thermal actuation to create monolithic compliant devices with embedded actuation in which the [...]