Perrin A., Ananthakrishnan V., Gao F., Sarma R., Ananthasuresh G.K.
University of Pennsylvania, 220 S. 33rd Street, US
Keywords: feature-based modeling, geometric modeling, heterogeneous modeling, mask generation, MEMS
A heterogeneous geometric modeler for microeletromechanical systmes (MEMS) is the focus of this paper. ON the basis of a comprehensive formalism describe in our earlier work, we present a 3-F implementation of the forward (from masks t oa model) and inverse (from model to masks) problems. In order to slve the inverse problem, it is necessary to ensure that the geometric model is compatible with the chosen process. For this purpose, we have developed a feature-based constrained modeler that allows the MEMS designers to build models that are compatible with a process. We have chosen the surface micromachining process to develop the model as well as present a few illustrative examples.
Journal: TechConnect Briefs
Volume: 1, Technical Proceedings of the 2001 International Conference on Modeling and Simulation of Microsystems
Published: March 19, 2001
Pages: 136 - 139
Industry sector: Sensors, MEMS, Electronics
Topic: Modeling & Simulation of Microsystems
ISBN: 0-9708275-0-4