Denison Rothrock G., Rolland J., Henn R.
Liquidia Technologies, US
Keywords: imprint lithography, nanopatterned film, precise replication
We describe the use of a new, enabling class of materials for performing precise, nano-scale imprint lithography for patterned film replication. These low surface energy, minimally adhesive, room-temperature photocurable perfluoropolyether (PFPE) elastomers, trademarked as Liquidia’s FluorocurTM resin series, are a unique class of fluoropolymers that are liquids at room temperature that can be functionalized and cured to form transparent “Teflon®-like” elastomers. Molds made from Fluorocur materials exhibit the favorable properties of both rigid and soft materials in that they are rapidly made and disposable, yet maintain the chemical resistance and performance of rigid materials such as quartz. Liquidia’s proprietary PRINTTM technology (Pattern Replication in Non-wetting Templates) utilizes molds of these materials to create nano-scale pattern replication with sub nanometer resolution.
Journal: TechConnect Briefs
Volume: 4, Technical Proceedings of the 2007 NSTI Nanotechnology Conference and Trade Show, Volume 4
Published: May 20, 2007
Pages: 567 - 570
Industry sector: Advanced Materials & Manufacturing
Topics: Advanced Manufacturing, Nanoelectronics
ISBN: 1-4200-6376-6