Using Scalar Algebraic Multigrid Solvers for Efficient 3-D Stress Analysis of Microfabricated Structures

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A methodology to improve the performance of iterative solvers in 3-D stress analysis using scalar algebraic multigrid (AMG) solvers has been presented. The principle idea is to split the global system of coupled stress governing discrete equations into a sequence of local matrix problems suitable for application of scalar AMG solvers. The proposed methodology has been implemented as a preconditioner for Krylov iterative methods. The effectiveness of the global solving procedure has been tested practically in 3D stress analysis of microfabricated structures. The numerical experiements have shown nearly opticam and stable convergence properties of the resulting iterative solvers in applications related to microfabrication technology.

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Journal: TechConnect Briefs
Volume: 1, Technical Proceedings of the 2001 International Conference on Modeling and Simulation of Microsystems
Published: March 19, 2001
Pages: 35 - 38
Industry sector: Sensors, MEMS, Electronics
Topics: Compact Modeling
ISBN: 0-9708275-0-4