The Use of Quantum Potentials for Confinement in Semiconductor Devices

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As MOSFETs are scaled into sub 100 nm (decanano) dimensions, quantum mechanical confinement and tunnelling start to dramatically affect their characteristics. In this paper we describe the introduction of quantum corrections within a 3D drift diffusion simulation framework using quantum potentials. We compare the density gradient (DG) and the effective potential (EP) approaches in term of accuracy and computational efficiency. Their application is illustrated with examples of 3D statistical simulations of intrinsic fluctuation effects in decanano MOSFETs. We also speculate about the capability of the DG formalism to handle source-to-drain tunnelling in sub 10 nm (nano) MOSFETS.

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Journal: TechConnect Briefs
Volume: 1, Technical Proceedings of the 2002 International Conference on Modeling and Simulation of Microsystems
Published: April 22, 2002
Pages: 490 - 493
Industry sector: Sensors, MEMS, Electronics
Topic: Modeling & Simulation of Microsystems
ISBN: 0-9708275-7-1