Wilson W.C., Atkinson G.M.
NASA Langley Research Center, US
Keywords: MEMS, sensors, strain, surface acoustic wave
A new multifunctional temperature and strain sensor is being investigated. The new sensor is based upon Surface Acoustic Wave (SAW) technology on a Langasite substrate. SAW sensors can be developed that respond to changes in the measurand by changing frequency or phase singly. However, when both temperature and strain change, the effects are combined making a single measurement difficult. A common solution is to measure temperature using a second sensor. While devices such as these have been developed, none provide temperature and strain from a single device [1, 2]. We have identified a region where only a thermal response is present in the phase data for SAW devices on Langasite. The measurement of temperature alone allows us to compensate the strain measurements and achieve temperature and strain from a single device.
Journal: TechConnect Briefs
Volume: 2, Nanotechnology 2012: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational (Volume 2)
Published: June 18, 2012
Pages: 211 - 214
Industry sector: Sensors, MEMS, Electronics
Topic: MEMS & NEMS Devices, Modeling & Applications
ISBN: 978-1-4665-6275-2