Chen J., Kang S-M
University of Illinois at Urbana-Champaign, US
Keywords: composite simulation, dynamical, model order reduction, nonlinear
This paper details advanced simulation techniques for efficiently determining system behavior of integrated microsystems that contains both circuit elements and micromechanical ones. Techniques for building reduced-order dynamical models for coupled energy domain non-liner (both weakly nonlinear and strongly nonlinear) MEMS devices have been developed. An open-ended and expandable simulation framework that enables complete simulation of integrated microsystems is also implemented.
Journal: TechConnect Briefs
Volume: Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems
Published: March 27, 2000
Pages: 213 - 216
Industry sector: Sensors, MEMS, Electronics
Topic: Modeling & Simulation of Microsystems
ISBN: 0-9666135-7-0