SUEX for High Aspect Ratio Micro-Nanofluidic Applications

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Microfluidics applications can benefit from a dry film approach in multiple ways – particularly in the preparation of multi-layer, multi-level fluidic channels and structures on patternable substrates and covers. In addition, polymer microreactors and other microTAS devices benefit from both excellent material compatibility, even for aggressive chemicals, and outstanding structure fidelity as well as very high aspect ratios and structural details of sub-micron resolution. Of special benefit is the extreme ease of use of the SUEX TDFS sheets, which come in thicknesses ranging from 100um to 1mm. The simplified lamination approach, reduced baking times, and the use of polymer substrates, which eliminates the debonding of the final devices from a rigid silicon or glass base, results in processing times of about 2 days for a 3-layer device. Examples and processing details will be discussed in the paper.

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Journal: TechConnect Briefs
Volume: 2, Nanotechnology 2012: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational (Volume 2)
Published: June 18, 2012
Pages: 404 - 407
Industry sectors: Advanced Materials & Manufacturing | Sensors, MEMS, Electronics
Topic: Micro & Bio Fluidics, Lab-on-Chip
ISBN: 978-1-4665-6275-2