Fabrication of microfluidic system for micro direct alcohol fuel cell: deep X-ray lithography of three-dimensional microstructures on a stainless steel

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Micro direct alcohol fuel cell, a type of micro fuel cell, is an alternative energy resource which generates electricity without fuel combusting. The micro fuel cell normally contains three parts of microchannels, electrodes, and membrane. By using a stainless steel as the substrate, this work is introducing deep X-ray lithography (DXL) for the fabrication of the microfluidic system. DXL, the most important processing step of the LIGA technique, allows on-demand manufacturing of high-aspect-ratio microstructures. Based on a radiation sensitive polymer material, DXL processes provide a 3D master microstructure on a stainless steel, which in general is reproduced in subsequent nickel electroforming and molding processes. This report gives a detailed description of DXL using a 25 microns thickness silver X-ray mask and presents a nickel electroforming to provide a nickel molding on a stainless steel.

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Journal: TechConnect Briefs
Volume: 2, Nanotechnology 2012: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational (Volume 2)
Published: June 18, 2012
Pages: 400 - 403
Industry sectors: Advanced Materials & Manufacturing | Sensors, MEMS, Electronics
Topics: Micro & Bio Fluidics, Lab-on-Chip
ISBN: 978-1-4665-6275-2