Structural Design of Micro Electrostatic Actuator for Optical Memory Using Design Windows Searching Method

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For satisfactory design of micromachines, this paper describes a search method for a multi-dimensional design window (DW), which is defined as an area of satisfactory solutions in a feasible design parameter space. The method consists of the following steps: (1) direct search for satisfactory design solutions using continuous evolutionary algorithm (CEA, a kind of EA), and (2) identification of DWs from the solutions using a modified K-means clustering algorithim. The obtained DWs are expected to give engineers useful information to understand a design problem, and, further, give them new ideas of design. To demonstrate practical performance of the proposed method, it was applied to a shape design of micro electrostatic actuator for optical memory.

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Journal: TechConnect Briefs
Volume: 1, Technical Proceedings of the 2001 International Conference on Modeling and Simulation of Microsystems
Published: March 19, 2001
Pages: 157 - 160
Industry sector: Sensors, MEMS, Electronics
Topic: Modeling & Simulation of Microsystems
ISBN: 0-9708275-0-4