Andjelic Z., Krippner P., Vogel A.
ABB Corporate Research Center, DE
Keywords: BEM, integral methods, magnetostatic, MBIT, sensors
The paper presents the methodology for the Simulation Based Design (SBD) of MEMS sensors influenced by mechanical and electromagnetic phenomena. The complexity of the problems mostly asks for both the efficient 3D numerical technologies and the sophisticated tools to capture the physical phenomena appearing in the operational conditions. In this paper we present the application of the Multipole Based Integral Technology (MBIT) for the simulation of MEMS-based paramagnetic oxygen sensors. A special procedure for the calculation of the forces caused by the molecular pressure is also presented.
Journal: TechConnect Briefs
Volume: 1, Technical Proceedings of the 2002 International Conference on Modeling and Simulation of Microsystems
Published: April 22, 2002
Pages: 279 - 282
Industry sector: Sensors, MEMS, Electronics
Topic: MEMS & NEMS Devices, Modeling & Applications
ISBN: 0-9708275-7-1