Xie H., Erdman L., Jing Q., Fedder G.K.
Carnegie Mellon University, US
Keywords: behavioral simulation, CMOS micromachining process, comb drive, NODAS library, vertical actuation
This paper reports the first design and its simulation and experimental results of a CMOS z-axis microactuator that utilizes the vertical electrostatic forces existing between multi-conductor comb fingers. The measured maximum displacement of the z-axis microactuator is 3.5 mm, and resonant frequency 6.17 kHz, which are in good agreement with the field simulation and the behavioral simulation results using the NODAS library [1]. The advantages of the z-axis actuator include compatibility with standard CMOS processes and easy implementation of 3-axis microstages, integrated position sensing components and motion control circuits.
Journal: TechConnect Briefs
Volume: Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems
Published: March 27, 2000
Pages: 181 - 184
Industry sector: Sensors, MEMS, Electronics
Topics: MEMS & NEMS Devices, Modeling & Applications, Modeling & Simulation of Microsystems
ISBN: 0-9666135-7-0