Wu W-Y, Ting J-M
National Cheng Kung University, TW
Keywords: diamond-like carbon, layered structures, self-assembling, Sputter Deposition, thin films
This paper reports the use of a conventional sputter deposition technique to produce self-assembled alternating nano-scaled layers consisting of diamond-like carbon (DLC) and metal. A conventional sputter deposition technique produces alternating layers only when multiple sputtering targets are employed. However, we have successfully demonstrated that the use of only one single sputtering gun in a conventional sputter deposition process could lead to the formation of alternating nano-scaled layers through self-assembling. The microstructure of the alternating layers was examined as a function of the deposition parameters.
Journal: TechConnect Briefs
Volume: 3, Technical Proceedings of the 2004 NSTI Nanotechnology Conference and Trade Show, Volume 3
Published: March 7, 2004
Pages: 448 - 451
Industry sector: Advanced Materials & Manufacturing
Topic: Personal & Home Care, Food & Agriculture
ISBN: 0-9728422-9-2