Kobrin B., Zhang T., Grimes M.T., Chong K., Nowak R., Chinn J.
Applied Microstructures, US
Keywords: durability, hydrophobic, MEMS, monolayers, resistance, self-assembled, stability
We report on hydrophobic self-assembled monolayers (SAM) with an improved chemical and mechanical stability on both Al and Si substrates. These improvements are obtained using a relatively new molecular vapor deposition method – MVDTM, which integrates the vapor deposition process of self-assembled mono-layers with various surface preparation techniques and adhesion layers. The results of liquid immersion tests, performed with a standard set of chemicals used in biochemistry and mass spectroscopy, show excellent chemical stability. Mechanical durability is studied on FDTS (Perfluorodecyltrichlorosilane) films and compared to a perfluorinated-DLC layer deposited using conventional PECVD technology. A dry wipe test, performed on both films using an HP-990 Maintenance Blades tester, reveals improved long-term mechanical stability of the FDTS hydrophobic film under intense mechanical impact. Nano-indentation scratch tests were performed using brass and steel balls and compared with acoustic emission signal and coefficient of friction measurements to evaluate durability of the mono- and multi-layer films. We have confirmed that film durability is proportional to the number of layers in a stack.
Journal: TechConnect Briefs
Volume: 3, Technical Proceedings of the 2006 NSTI Nanotechnology Conference and Trade Show, Volume 3
Published: May 7, 2006
Pages: 155 - 157
Industry sector: Advanced Materials & Manufacturing
Topic: Advanced Manufacturing
ISBN: 0-9767985-8-1