PECVD synthesis of Si nano-wires


Keywords: ,

Silicon nano-wires 42 nm in diameter and up to 70 micrometer long have been obtained by utilizing a common for an average nano-fabrication facility plasma equipment set that did not require special modifications.

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Journal: TechConnect Briefs
Volume: 1, Nanotechnology 2008: Materials, Fabrication, Particles, and Characterization – Technical Proceedings of the 2008 NSTI Nanotechnology Conference and Trade Show, Volume 1
Published: June 1, 2008
Pages: 623 - 625
Industry sector: Advanced Materials & Manufacturing
Topics: Advanced Manufacturing, Nanoelectronics
ISBN: 978-1-4200-8503-7