TechConnect Proceedings Papers
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Lead Frame Package of MEMS Devices using Wafer-level, Air-gap Structures
This research looks at using a polymer Air-gap structures as a cost efficient method of wafer and chip level packaging MEMS devices for a wide range of applications. The presentation will describe how this style [...]
Design, Fabrication and Characterization of Inverse Adiabatic Fiber-To-Chip Couplers
Araghchini M., Khilo A., Holzwarth C.W., Dahlem M.S., Smith H.I., Ippen E.P., Kärtner F.X., Massachusetts Institute of Technology, US
In silicon photonics, light sources are typically located off-chip and connected to the chip with optical fibers. The problem of efficient coupling between the fiber and a submicron waveguide is challenging because the mode areas [...]
Tin oxide nanowire sensors for highly sensitive detection of toxic gases
Koeck A., Brunet E., Griessler C., Maier T., Mutinati G., Steinhauer S., AIT Austrian Institute of Technology GmbH, AT
Numerous applications ranging from industrial process control to personal safety systems and environmental monitoring have a strongly increasing demand for highly sensitive gas detecting devices. We present nanosensors based on SnO2-nanowires, which are extremely sensitive [...]
Design and Fabrication of a Multi-Axis MEMS Force Sensor with Integrated Carbon Nanotube Based Piezoresistors
Nanonewton level, multi-axis force sensing is required for many biology, materials science and nanomanufacturing applications. Unfortunately, these requirements are difficult to achieve given the size, sensitivity and fabrication limitations associated with existing small-scale sensing techniques. [...]
Space Applications for Wireless Sensors
Reducing the weight of spacecraft will reduce both fabrication and launch costs. The elimination of wiring and wiring harnesses reduces the total mass of the vehicle. Wireless sensor technology can reduce the weight and therefore [...]
Programmable MEMS-Based Silicon Timing Solutions Change the Game
For the past few decades, the electronics industry has relied on quartz based timing solutions, which involve machining of crystals and then marrying them to analog circuits inside an expensive, ceramic package. Furthermore, this package [...]
AC and DC Applications of Three-Dimensional Nano-electro-mechanical-systems
AC and DC Applications of Three-Dimensional Nano-electro-Mechanical-Systems Anupama B. Kaul,1 (*)Abdur R. Khan,1,2 Krikor G. Megerian,1 Leif Bagge,1,3 and Larry Epp,1 1Jet Propulsion Laboratory, California Institute of Technology, Pasadena, California 91109 2Keck School of Medicine, [...]
Design of a g-force meter on Si wafer, based on motor driven by photons
The fundamental limitations of the nano-scale motors driven by flux of photons are well understood. The amount of torque that can be obtained in any nano-scale structure is very low, presenting a real challenge to [...]
Parallel Fabrication of Single-Walled Carbon Nanotube based Piezoresistive Pressure Sensors
A major obstacle in the realization of commercially viable single-walled carbon nanotube (SWNT) based devices, hindering the functionality of this uniquely interesting type of material, is their type and site selective integration. In this work, [...]