TechConnect Proceedings Papers
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Nanovias FIB-etching and filling in a micro-nano interposer for molecular electronics
As molecular electronics is getting more and more explored, a device enabling electrical characterization of the synthesized molecules becomes necessary. A micro-nano interposer is thus developed to allow connection between a molecular circuit and mesoscopic [...]
Characterization of Refined Beams of Neutral Free Radicals Produced by Photo-Deionization of Negative Ion Beams
Ion-current difference measurement by light intensity modulation ( ICD ) is introduced as a convenient method to characterize a purified beam of momentum-controlled neutral free radicals produced by photo-deionization of a negative ion beam for [...]
Computer Simulations and Experimental Study of Graphane-Like Materials Produced by Electrolytic Hydrogenation
Graphane and graphane-like materials in spite of their recent origin [1,2] are objects of great interest for many researchers, because of very wide field of their potential applicability: hydrogen energetic, electronics, materials science etc. The [...]
Direct Manufacturing of Functional Structures on 3D microscale surfaces by Laser Dynamic Forming
This paper demonstrates a scalable and fast-shaping top-down integration technique, Laser Dynamic Forming (LDF), capable of manufacturing 3D functional structures conformal to micro-to-mesoscale curvilinear features on various substrates by the laser-induced shockwave. The functional devices [...]
A novel cyclic forward-backward extrusion process for production of ultrafine grains materials
A new cyclic forward-backward extrusion (CFBE) process was introduced as a severe plastic deformation (SPD) technique to produce ultrafine-grained aluminum rods. According to transmission electron microscopy (TEM) and electron backscatter diffraction (EBSD) results, the average [...]
A study of the Demolding Force in Nano Imprint Lithography For Different Surface Treatments
The NIL process can be divided into two steps: the pressing and demolding stages. In the pressing stage, micro/nano scale patterns on a mold are transferred to a polymer resist. During this stage, there are [...]
A new method for vertical growth of silicon nanowire in the vapor-liquid-solid (VLS) process
Kim Y.J., Suh D., Lee M.L., Ryu H., Electronics and Telecommunications Research Institute (ETRI), KR
We present a new facile method for vertical growth of the silicon nanowire (Si NW) that obviates the need for SiCl4 in vapor-liquid-solid (VLS) process. The VLS process that involves SiCl4 has two major disadvantages; [...]
Tunable-Linewidth Nanoimprint Working Stamps Fabricated by Double Oblique Metal Deposition
This paper proposes a low cost but rapid methodology for fabricating working stamps with tunable line-width or pitch structures. Conventionally, the master stamp for nanoimprint lithograph (NIL) is made of silicon by e-beam lithography, which [...]
Synthesis of silicon nanoparticles by picosecond laser ablation in liquid
The one of the most promising method for the producing of silicon-based NPs is the laser ablation of solid target in liquid (LAL), because it’s relatively simple, fast and “green”. In this work we produced [...]