It is shown that by optimizing ion-solidinteractions, nano-lines of different aspect ratios can be machined into samples using focused ionbeams.
Journal: TechConnect Briefs
Volume: 2, Technical Proceedings of the 2005 NSTI Nanotechnology Conference and Trade Show, Volume 2
Published: May 8, 2005
Pages: 683 - 686
Industry sector: Advanced Materials & Manufacturing
Topics: Materials Characterization & Imaging