Optimization of Nano-Machining with Focused IonBeams

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It is shown that by optimizing ion-solidinteractions, nano-lines of different aspect ratios can be machined into samples using focused ionbeams.

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Journal: TechConnect Briefs
Volume: 2, Technical Proceedings of the 2005 NSTI Nanotechnology Conference and Trade Show, Volume 2
Published: May 8, 2005
Pages: 683 - 686
Industry sector: Advanced Materials & Manufacturing
Topics: Materials Characterization & Imaging
ISBN: 0-9767985-1-4