Attota R., Silver R.M., Vladar A.
NIST, US
Keywords: measurement, metrology, nanometrology, nanoparticle, TSOM
We present a novel optical technique that produces nanometer dimensional measurement sensitivity using a conventional optical microscope, by analyzing through-focus scanning optical microscope (TSOM – pronounced as ‘tee-som’) images obtained at different focus positions. In principle, this technique can be used to identify which dimension is changing between two nanosized targets and to determine the dimension using a library-matching method. This methodology has potential utility for a wide range of target geometries and application areas, including nanomanufacturing, defect analysis, semiconductor process control, and biotechnology. In the current paper we present nanoparticle size and shape evaluation using the TSOM method.
Journal: TechConnect Briefs
Volume: 3, Nanotechnology 2010: Bio Sensors, Instruments, Medical, Environment and Energy
Published: June 21, 2010
Pages: 172 - 175
Industry sectors: Medical & Biotech | Sensors, MEMS, Electronics
Topics: Biomaterials, Materials Characterization & Imaging
ISBN: 978-1-4398-3415-2