Mankin M.N., Pan T.S.
Modern Electron, US
Keywords: field emission heat engine, LaB6, lanthanum hexaboride, low fill factor grid, low work function, low-loss grid, microfabrication, nanofabrication, vacuum electronic
We present the first nano- and microfabrication of vacuum microelectronic components incorporating lanthanum hexaboride (LaB6), a refractory low work function material with high electron emissivity. We design novel fabrication processes which yield ultra-low fill factor (
Journal: TechConnect Briefs
Volume: 4, Advanced Manufacturing, Electronics and Microsystems: TechConnect Briefs 2016
Published: May 22, 2016
Pages: 45 - 47
Industry sector: Advanced Materials & Manufacturing
Topic: Advanced Manufacturing
ISBN: 978-0-9975-1173-4