Vertsanova O., Perlov I., Tsyganok B.
National Technical University of Ukraine, UA
Keywords: acoustics, hydrophone, MEMS, resonator, silicon
Authors developed the one-dimensional mathematical model of piezoelectric detection of photoacoustic effect in thermally thick and optically opaque sample with subsurface defect. The model is developed in view of the assumptions of ideally rigid connection piezosensor with sample and free fastening of sensor in a microscope cell. This model allows to investigate thermal and elastic properties of solids and subsurface defects. The model can be applied for decoding of computer photoacoustic images and their further analysis. The presented by authors photoacoustic images suggest the introduction of the PAM technique for the NDE of microcircuits, thin film and microwelded connection.
Journal: TechConnect Briefs
Volume: Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems
Published: March 27, 2000
Pages: 249 - 252
Industry sector: Sensors, MEMS, Electronics
Topic: Modeling & Simulation of Microsystems
ISBN: 0-9666135-7-0