Socher E., Bochobza-Degani O., Elata D., Nemirovsky Y.
Israel Institute of Technology, IL
Keywords: burn-out, electro-thermal modeling, numerical scheme, thermal runaway
This work analyzes the electro-thermal behavior of thermally isolated micromachined resistive structures. A novel numerical scheme for solving the coupled electro-thermal problem is suggested. The novel scheme can capture the thermal instabilities under both voltage and current control. The model is compared with experimental data showing good agreement.
Journal: TechConnect Briefs
Volume: 1, Technical Proceedings of the 2003 Nanotechnology Conference and Trade Show, Volume 1
Published: February 23, 2003
Pages: 384 - 387
Industry sectors: Advanced Materials & Manufacturing | Sensors, MEMS, Electronics
Topic: MEMS & NEMS Devices, Modeling & Applications
ISBN: 0-9728422-0-9