Maekoba H., Helin P., Reyne G., Bourouina T., Fujita H.
Cybernet Systems Co. Ltd., JP
Keywords: ANSYS simulation, bi-stable, electro-magnetic actuation, optical switch, optimization
High performance silicon-based, micro-optical switch are being developed for application to optical networks. The mechanical part was fabricated in a one-level mask step by bulk micromachining of (100) monocrystalline silicon with KOH. The resulting structure was assembled with a 100mm-thick Permalloy piece and then, it was associated to a small magnetic circuit for its electromagnetic actuation. In order to avoid power consumption during ON and OFF states, a bi-stable operation principle is proposed. The bi-stable behavior is obtained thanks to a stable mechanical position due to the cantilever stiffness and a second magnetic stable position due to a magnet. Switching operation is provided by electrical currents in windings. The purpose of the present paper is to present a study on modeling and optimization of this system by means of FEM simulations using ANSYS software. Iterative magneto-mechanical simulations are performed. Optimization of dimensions and material properties is presented.
Journal: TechConnect Briefs
Volume: Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems
Published: March 27, 2000
Pages: 166 - 169
Industry sector: Sensors, MEMS, Electronics
Topics: MEMS & NEMS Devices, Modeling & Applications, Modeling & Simulation of Microsystems
ISBN: 0-9666135-7-0