This work deals with the analysis of silicon passive microvalves. The analysed microvalves consist of a circular central mass suspended by two flexible beams anchored on a pyrex substrate. The mechanical and fluidic analysis are first done by FEM (FLOTRAN) simulations, and afterwards the results are compared to an iterative analytical model, showing good agreement at low flow rates. In this model, we have taken into account viscous losses as well as inertial ones, usually neglected in model extraction and validation. A good fitting is achieved at high flow rates for a diminished inertial losses contribution. Measurements with air have been carried out in order to validate the proposed model.
Journal: TechConnect Briefs
Volume: Technical Proceedings of the 1999 International Conference on Modeling and Simulation of Microsystems
Published: April 19, 1999
Pages: 554 - 557
Industry sector: Sensors, MEMS, Electronics
Topicss: Micro & Bio Fluidics, Lab-on-Chip, Modeling & Simulation of Microsystems