Husak M.
University of Prague, CZ
Keywords: actuators, equivalence, microsystems, model, sensors, system
The paper presents ideas about possible approaches to development of microsystem models. From the general point of view, microsystem (MST) is considered as a system dealing with non-electrical quantities from all energy domains of real environment. System modeling of properties of the whole system is required for complex approach to MST design. System modeling is described on higher and lower level. For design optimization it is necessary to use modeling on structural and material levels, further it is necessary to consider influence of technological process and modeling on physical level. Frequently design can be simplified utilizing equivalent models realized by equivalence of discrete elements between various energy domains. It is possible to demonstrate MST operation using, micromodels (SOFT) or macromodels (HARD). Micromodels are developed from macromodels according to the rules for design of integrated MST.
Journal: TechConnect Briefs
Volume: 1, Technical Proceedings of the 2003 Nanotechnology Conference and Trade Show, Volume 1
Published: February 23, 2003
Pages: 272 - 275
Industry sector: Sensors, MEMS, Electronics
Topics: MEMS & NEMS Devices, Modeling & Applications, Sensors - Chemical, Physical & Bio
ISBN: 0-9728422-0-9